Micromachined Thin-Film Mirror Array for Reflective Light Modulation

Abstract Actuated Mirror Array (AMA) is a new reflective type light modulator that uses micromachined thin film piezoelectric actuators in conjunction with 300,000 micro mirrors of 100μm by 100μm size. A mirror array module consists of the active matrix, where the image signal voltages are applied, and the cantilever beams, which are actuated by the applied signal voltages, on top of the active matrix. Since the tilting of the mirror pixel defines the gray scale of the light beam on the screen, the 300,000 mirror pixels should have initial positions as uniform as possible. A novel support anchor design for the micromachined cantilever beams is developed to provide uniform initial deflection of the cantilevers. By implementing a secondary support to the anchor of the cantilever beams, the initial deflection can be reduced up to 35%