Deposition of Amorphous Hydrogenated Carbon Nitride Films with a Dielectric Barrier Discharge

. The two electrodes (Figure 2)inside the chamber are made from stainless steel plates with alengthof8.3cm,width3.3cm,andthickness0.15cm.Bothstainlesssteel electrodes are covered by dielectrics: the upper (powered)electrode is covered with aluminum oxide (e 10) and the lower(grounded)electrodewithaglassplate(e 3.8).Bothelectrodesareseparated 0.2cm from each other by a Teflon (PTFE) spacer with