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Transition from ballistic to thermalized transport of the metal sputtered species in DC magnetron
Transition from ballistic to thermalized transport of the metal sputtered species in DC magnetron
2021
Adrien Revel
Abderzak El Farsy
Ludovic de Poucques
J. Robert
Tiberiu Minea
Keywords:
Condensed matter physics
Metal
Cavity magnetron
Materials science
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