Technologies of perforation of closely spaced micron holes with the help of neodymium—LiF:F2- lasers

The picosecond (based on Nd:YLF—LiF:F2- crystals) and nanosecond (Nd:YAG—LiF:F2-) laser technologies are proposed for perforating closely spaced micron holes in aluminium foil for microelectronics, medicine, and biology. Two-dimensional matrices of holes with diameters of 2–20 μm spaced from each other by 8–30 μm are obtained in 20-μm-thick aluminium foil. It is shown that it is possible to increase the hole density and decrease their diameter by controlling the laser irradiation regime. A sample of perforated aluminium foil is obtained with the total area of micron holes comprising 30% of the entire surface.