Investigation on Mist CVD-Derived Hf x Zr 1-x O 2 Ferroelectric Thin Films Post-Deposition Annealed by Rapid Thermal Annealing

2021 
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    0
    References
    0
    Citations
    NaN
    KQI
    []