Old Web
English
Sign In
Acemap
>
Paper
>
Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding
Plastic Deformation of Thin Si Membranes in Si-Si Direct Bonding
2016
Erik Poppe
Geir Uri Jensen
Sigurd T. Moe
Dag Thorstein Wang
Keywords:
Deformation (engineering)
Structural engineering
Composite material
Direct bonding
Membrane
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]