Fabrication of planar nano-gap electrodes for single molecule evaluation

This paper aims is to fabricate planar nano-gap electrodes for single molecule characterization, which allow to measure the intrinsic nature of single molecule and to derive the number of molecules on them by atomic force microscopy (AFM), whereas conventional non-planar ones do not. Thus, the planar nano-gap electrodes are the essential tool for single molecule electronics research. Currently, the fabrication technology by anodic bonding realized planar electrodes with 300 nm in width and 200 nm in length. Insulation characteristics of the fabricated electrodes were evaluated and were in the order of 1012 Ω, which indicates that these electrodes are suitable for single molecule evaluation.