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Defects in Epitaxially Grown Silicon Wafers Causing Lifetime Patterns
Defects in Epitaxially Grown Silicon Wafers Causing Lifetime Patterns
2018
Stefan Janz
Florian Schindler
Elke Gust
T. Fehrenbach
Friedemann D. Heinz
P. Beu
M. Drießen
Keywords:
Optoelectronics
Epiwafer
Wafer
Epitaxy
Materials science
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