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Estimation of electron temperature and density of the decay plasma in a LADPP EUV source
Estimation of electron temperature and density of the decay plasma in a LADPP EUV source
2011
Qiushi Zhu
takasi hirosi mutou
junzaburou yamada
masahito watanabe
akira syun okino
kazuhiko horioka
eiki hotta
Keywords:
Computer security
Plasma
Electron temperature
Vacuum arc
Computer science
Atomic physics
Stark effect
Electron density
Extreme ultraviolet lithography
Correction
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