Molecular dynamics simulations of nanoscale engravings on an alkanethiol monolayer

Nanoscale patterns engraved on the bulk monolayer of 1-decanethiol were examined using molecular dynamics simulations. The smallest widths required for stable circular and linear engravings were found to be 3.2 and 2.4 nm, respectively. The minimum separations possible without merging for circular and linear trenches were 2.0 and 2.6 nm, respectively. These values set the ultimate the size limit and spatial resolution for engraving the alkanethiol monolayer.