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Plasma etching with magnetic field enhancement.
Plasma etching with magnetic field enhancement.
1987
David Cheng
Dan Maydan
Sasson Somekh
Kenneth R. Stalder
Dana Andrews
Mei Chang
John M. White
Jerry Yuen Kui Wong
Vladimir J. Zeitlin
David Nin-Kou Wang
Keywords:
Nuclear magnetic resonance
Plasma etching
Magnetic field
Materials science
Optoelectronics
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