Efficient light trapping in silicon heterojunction solar cells via nanoimprint periodic texturing

The surface patterning of Si heterojunction solar cells is of key importance to enhance the light trapping properties and enable high efficiencies of the emerging thin crystalline silicon solar cells. Herein, periodic inverted pyramids with different periodicity patterns were fabricated by nanoimprint lithography in combination with dry- and wetetching techniques. The impact of their periodicity on the light trapping properties was studied by measuring their reflectance and photoluminescence properties. The inverted pyramids with 700 nm periodicity show excellent anti-reflection and selective light-trapping properties.