Piezoelectric electron acoustic microscopy and some applications to materials analysis

Abstract Piezoelectric scanning electron acoustic microscope(SEAM) has been built in our lab, which is a new technique to nondestructive materials analysis. Physical process of electron acoustic imaging was briefly described. Some electron acoustic photographs for different materials were presented. It demonstrates that SEAM has important potential applications to study of interface features of coating or film like materials, residual stress distribution, detection of subsurface features. Some results were first reported in this paper.