Compact In-Run Navigation Grade IMU Based on Quartz MEMS

Emcore has demonstrated a miniaturized Inertial Measurement Unit (IMU), based on Systron Donner Inertial technology, with in-run navigation grade performance. The compact IMU is based on three quartz MEMS Coriolis Vibratory Gyroscopes (CVG) and three quartz MEMS resonant accelerometers. Experimental characterization of the gyroscopes revealed angle random walk of lower than 0.0008 °/ $\sqrt{}$ hr (0.05 (°/hr)/ $\sqrt{}$ Hz) with bias instability of 0.005 °/hr at stable temperature and on the order of 0.01 °/hr at uncontrolled temperature. The accelerometers demonstrated a velocity random walk of 50 ug/ $\sqrt{}$ Hz, with bias instability of a few $\mu$ g. This performance was achieved within the SDI500 form factor of 19 cubic inches.