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High K Metal Gate Aluminum CMP Challenges and Solutions
High K Metal Gate Aluminum CMP Challenges and Solutions
2010
Kun Xu
Yufei Chen
Hassan G. Iravani
Yuchun Wang
Bogdan Swedek
May Yu
You Wang
Wen-Chiang Tu
Sherry Xia
Lakshmanan Karuppiah
Keywords:
High-κ dielectric
Aluminium
Materials science
Inorganic chemistry
Optoelectronics
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