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Aluminum nitride thin films for MEMS resonators: Growth and characterization
Aluminum nitride thin films for MEMS resonators: Growth and characterization
2006
Vanni Lughi
Keywords:
Thin film
Raman spectroscopy
Resonator
Nitride
Analytical chemistry
Residual stress
Microelectromechanical systems
Acoustic wave
Aluminium
Materials science
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