Fabrication of a novel scanning probe device for quantitative nanotribology

Abstract In this work a new scanning probe device for quantitative frictional force measurements is presented. The design of this so-called “tribolever” is optimized for lateral or frictional force detection, with relatively less sensitivity for vertical and torsional motions. Fabrication process for the complicated 3-D structure in a silicon wafer has been developed using a combination of anisotropic deep dry etchings and crystallographic wet etching. Additional fabrication techniques have been explored to tune the mechanical properties of a given tribolever device to the right operation regime.