Microfabrication of high performance optical diaphragm by plasma ion beam etching technology

Agnes Mestreau,Henri Bernardet,Guy Dancoing,Xavier Godechot,Christian Pezant,Vincent Stenger,Bernard Cousin,Pierre Etcheto,Georges Otrio

Microfabrication of high performance optical diaphragm by plasma ion beam etching technology

2018

Agnes Mestreau
Henri Bernardet
Guy Dancoing
Xavier Godechot
Christian Pezant
Vincent Stenger
Bernard Cousin
Pierre Etcheto
Georges Otrio

This paper, “Microfabrication of high performance optical diaphragm by plasma ion beam etching technology," was presented as part of International Conference on Space Optics—ICSO 1997, held in Toulouse, France.

Keywords:

Ion beam
Diaphragm (structural system)
Plasma
Etching
Microfabrication
Analytical chemistry
Materials science
ion beam etching
Optoelectronics

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