Improved on-chip lightwave measurements of non-planar optoelectronic devices

In this paper we discuss the difficulties associated with the high-frequency characterization of optoelectronic devices. We present solutions that improve the accuracy of conventional (l) and previously reported (2)-(6) techniques for measuring the high-frequency modulation response of optoelectronic devices. The mathematical expressions necessary for calibration are implemented in the parameter extraction software HP- ICCAP. All the measurement equipment is controlled with this software. Using a non-conventional wafer probe, it is now possible to contact devices with a strong non-planar surface. As a measurement example, we present experimental results for a non-planar, 980 nm strained quantum well laser diode.