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Development of the fabrication platforms for MEMs technology
Development of the fabrication platforms for MEMs technology
2004
Weileun Fang
Jerwei Hsieh
Hung-Yi Lin
Mingching Wu
Huai-Yuan Chu
Keywords:
Analytical chemistry
Materials science
Micro-Opto-Electro-Mechanical Systems
Optical switch
Transistor
Fabrication
Ceramic materials
Microelectromechanical systems
Silicon
Electronic engineering
Nanotechnology
Etching
Optics
Correction
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