CO2 laser-produced Sn-plasma source for high-volume manufacturing EUV lithography
2008
We are developing a laser produced plasma light source for high volume manufacturing (HVM) EUV lithography. The
light source is based on a high power, high repetition rate CO 2 laser system, a tin target and a magnetic ion guiding for
tin treatment. The laser system is a master oscillator power amplifier (MOPA) configuration. We have achieved an
average laser output power of 10 kW at 100 kHz by a single laser beam with good beam quality. EUV in-band power
equivalent to 60 W at intermediate focus was produced by irradiating a tin rotating plate with 6 kW laser power. This
light source is scalable to more than 200 W EUV in-band power based on a 20-kW CO 2 laser. Collector mirror life can
be extended by using droplet target and magnetic ion guiding. Effectiveness of the magnetic ion guiding is examined by
monitoring the motion of fast Sn ion in a large vacuum chamber with a maximum magnetic flux density of 2 T.
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