Three-Dimensional X-ray Topography and Its Applications

The lattice defects in bulky crystals have three-dimensional distribution. The evaluation technique should provide three-dimensional information of these defects. X-ray topography is the only way to nondestructively characterize the defects in the single crystals with high sensitivity to strain. However, a laboratory X-ray source is too weak to get three-dimensional information by X-ray topography. Synchrotron light source showed the possibility of three-dimensional X-ray topography with its performance. In this report, we describe the techniques of three-dimensional X-ray topography and its applications at SPring-8.