Texture analysis of silicide thin films: combining statistical and microscopical information

The statistical distribution of grain orientations in a poly-crystalline thin film, called texture, is an important characteristic. The presence of preferred orientations is important for the macroscopical behaviour of the film due to an anisotropy of certain properties, like resistivity, carrier mobility, etc. Therefore it is important to know, which types of texture evolve for a certain combination of substrate and film material and in which way they depend on the sample preparation.