Old Web
English
Sign In
Acemap
>
Paper
>
Electromigration in sub-micron Copper Interconnects in Low- k Dielectrics
Electromigration in sub-micron Copper Interconnects in Low- k Dielectrics
2006
Birendra N. Agarwala
Kaushik Chanda
Hazara Singh Rathore
Du Nguyen
Chao-Kun Hu
P. McLaughlin
J. Demarest
Lawrence A. Clevenger
Chih-Chao Yang
Keywords:
Dielectric
Electromigration
Micrometre
Copper
Analytical chemistry
Materials science
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]