Investigation of structural and optical properties of Ag nanoclusters formed in Si(100) after multiple implantations of low energies Ag ions and post-thermal annealing at a temperature below the Ag-Si eutectic point

Mangal Dhoubhadel,Bibhudutta Rout,Wickramaarachchige J. Lakshantha,Sushanta K. Das,Francis D'Souza,Gary A. Glass,Floyd Del McDaniel

Investigation of structural and optical properties of Ag nanoclusters formed in Si(100) after multiple implantations of low energies Ag ions and post-thermal annealing at a temperature below the Ag-Si eutectic point

2014

Mangal Dhoubhadel
Bibhudutta Rout
Wickramaarachchige J. Lakshantha
Sushanta K. Das
Francis D'Souza
Gary A. Glass
Floyd Del McDaniel

This paper investigates the synthesis of Ag NCs in Si(100) substrate by implanting multiple energies and fluences of Ag ions and subsequent thermal annealing.

Keywords:

Eutectic system
Ion implantation
Nanoclusters
Annealing (metallurgy)
X-ray photoelectron spectroscopy
Ion
Materials science
Inorganic chemistry
Metallurgy
Substrate (chemistry)
Chemical engineering

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