A process for producing a sensor with a membrane structure

A sensor for measuring a physical amount, such. B. an amount of air comprises a membrane structure (10), which is composed of metal strips (3, 5) which are inserted between first and second insulating layers (22, 25). A platinum or the like produced metal layer (23) is formed on the first insulating layer (22) and then heat-treated to improve their properties. Then, the metal layer (23) in a form of metal strips (3, 5) is etched. The second, made of a material such as silicon dioxide insulating layer (25) is formed on the etched metal strips. Since the metal layer (23) is heat-treated before it in the form of metal strips (3, 5) is etched, the metal strip is not deformed by the heat treatment. The second insulation layer (25) may be formed on the metal bands, without cracks in the second insulating layer (25) formed.