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Low thermal budget 6 nm furnace N 2 O-nitrided gate oxides
Low thermal budget 6 nm furnace N 2 O-nitrided gate oxides
2010
G.M. Paulzen
E.K.H. Hutten
V.M.H. Meyssen
Keywords:
Thermal
Electronic engineering
Physics
Nitriding
Time-dependent gate oxide breakdown
Analytical chemistry
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