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The influence of substrate biasing on the crystallinity of Al$_2$O$_3$ films
The influence of substrate biasing on the crystallinity of Al$_2$O$_3$ films
2010
Marina Prenzel
Tim Baloniak
Achim von Keudell
Keywords:
Crystallinity
Biasing
Substrate (chemistry)
Materials science
Inorganic chemistry
Chemical engineering
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