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The effect of frequency-dependent electron swarm parameters on fluid modeling of high-frequency CCP discharges
The effect of frequency-dependent electron swarm parameters on fluid modeling of high-frequency CCP discharges
2012
Rochan Upadhyay
Shankar Mahadevan
Ikuo Sawada
Mirko Vukovic
Peter L. G. Ventzek
Laxminarayan L. Raja
Keywords:
Electron
Physics
Analytical chemistry
Swarm behaviour
Materials science
fluid modeling
Mechanics
Correction
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