Principle of Auger Electron Spectroscopy

The excitation process of an Auger electron is explained in this chapter. An Auger transition, labeled as KL2L3, occurs through a mechanism involving three electrons in 1s1/2, 2p1/2, and 2p3/2 energy levels of an analyte element, which can be utilized for the elemental analysis because the Auger electron emitted from the 2p3/2 orbital has a particular kinetic energy.