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2306 A study on a two-axial piezoelectric actuator
2306 A study on a two-axial piezoelectric actuator
2006
Masahiro Ohka
Shiho Matsukawa
Yasuhiro Sawamoto
Tetus Miyaoka
Yasunaga Mitsuya
Keywords:
Actuator
Piezoelectric accelerometer
Piezoelectric motor
Control engineering
PMUT
Pneumatic actuator
Materials science
Piezoelectricity
Acoustics
piezoelectric actuators
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