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Silicon Bulk Machining of Electrostatic Micromotors Fabrication and Potential Applications
Silicon Bulk Machining of Electrostatic Micromotors Fabrication and Potential Applications
1993
H. Ziad
A. Bounhir
Serge Spirkovitch
François Baillieu
Tarik Bourouina
Jaymee T. Marty
S. Rigo
A. Lhoir
Keywords:
Electronic engineering
Engineering
Fabrication
Machining
Silicon
Correction
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