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Surface Passivation of Tunnel Silicon Oxide Grown by Ozone Oxidation
Surface Passivation of Tunnel Silicon Oxide Grown by Ozone Oxidation
2018
Jong-Hoon Baek
Cho Young Joon
Chang Hyo Sik
Keywords:
Materials science
Composite material
Chemical engineering
Ozone
Passivation
Silicon oxide
Correction
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