Room temperature operation of AlGaN/GaN quantum well infrared photodetectors at a 3–4 µm wavelength range

Experimental results showing room temperature normal incidence mid-infrared detection by AlGaN/GaN quantum well infrared photodetectors are presented. Designed structures have intersubband transitions corresponding to wavelengths in the region of 3 and 4 µm, where strong absorption in a sapphire substrate dominates. The intersubband spectra, therefore, were characterized by electronic Raman scattering and infrared photocurrent spectroscopy. The absorption spectra agree well with theoretical predictions. Details of device fabrication are presented with sensitivity estimates for the devices.