Analysis and mitigation of forbidden pitch effects for EUV lithography

Features in forbidden pitch have limited exposure latitude and depth of focus in lithography exposure. This paper provides an analysis of forbidden pitch in extreme ultraviolet lithography (EUVL) from the perspective of rigorous simulation and source mask optimization (SMO). In the stage of rigorous simulation, S-litho is used to analyze the normalized image log slope (NILS) of test patterns from different critical layer in 5nm node. Then the process windows of these test patterns are simulated and compared by the lithography simulator Proteus WorkBench. From the result analysis, the forbidden pitches of critical layer in 5nm node are summarized. In addition, the strategy of mitigating the negative effect of forbidden pitch is proposed with the help of computational lithography.