Fabrication of a three-dimensional multichamber using polymer bonding and MEMS technology

In this paper, we propose an advanced design for a multichamber type PCR reactor array by which continuous amplification and the cultivation of various samples are possible. The newly designed PCR reactor array consists of three bonded wafers, and a middle silicon/glass wafer sandwiched between the top and bottom glass wafers. In particular, the middle silicon/glass wafer was produced in order to maintain thermal equilibrium effectively by using polymer bonding technology and MEMS technology.