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Optical Properties of Bulk SiGe in the Near Infrared Evaluated by Spectroscopic Ellipsometry
Optical Properties of Bulk SiGe in the Near Infrared Evaluated by Spectroscopic Ellipsometry
2021
Yuki Shibayama
Ryo Yokogawa
Yasutomo Arai
Ichiro Yonenaga
Atsushi Ogura
Keywords:
spectroscopic ellipsometry
Optoelectronics
Materials science
Near-infrared spectroscopy
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