P‐93: Highly Reliable Mobile Liquid Crystal Display using AIOx Deposited By Atomic Layer Deposition for Side Sealing Structure

Tetsuji Ishitani,Daisuke Kubota,Masaru Nakano,Yusuke Kubota,Koji Moriya,Akio Yamashita,Yujiro Sakurada,Koji Kusunoki,Hideaki Shishido,Kazuya Sugimoto,Yoshiharu Hirakata,Shunpei Yamazaki,Masahiko Hayakawa

P‐93: Highly Reliable Mobile Liquid Crystal Display using AIOx Deposited By Atomic Layer Deposition for Side Sealing Structure

2015

Tetsuji Ishitani
Daisuke Kubota
Masaru Nakano
Yusuke Kubota
Koji Moriya
Akio Yamashita
Yujiro Sakurada
Koji Kusunoki
Hideaki Shishido
Kazuya Sugimoto
Yoshiharu Hirakata
Shunpei Yamazaki
Masahiko Hayakawa

A side sealing structure including, outside a sealant, AlOx deposited using an atomic layer deposition (ALD) apparatus was employed. This structure can prevent the entry of external moisture. A liquid crystal display (LCD) with this type of structure can have long-term high reliability as a low-frequency driving LCD.

Keywords:

Nanotechnology
Atomic layer deposition
Moisture
Sealant
Liquid-crystal display
Composite material
Materials science

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