Лазерная очистка микроструктурированной поверхности микроострийных автоэмиссионных катодов

Laser technology for cleaning the micropeak glass-carbon cathodes with high density of current emission is described in the article. The low-power fiber laser was applied for laser cleaning of microstructure surfaces. This technology will allow reducing the manufacture time. Operation amount for the same result with the other equipment will be reduced. The electronic components quality with micropeak structures will be improved.