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Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate
Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate
2018
Chengwu Wang
Syuhei Kurokawa
Julong Yuan
Li Fan
Huizong Lu
Zhe Wu
Weifeng Yao
Kehua Zhang
Yu Zhang
Toshiro Doi
Keywords:
Substrate (chemistry)
Laser ablation
Analytical chemistry
Femtosecond
Materials science
sic substrate
femtosecond laser ablation
Optoelectronics
Correction
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