Optical properties of Er x Yb 2−x Si 2 O 7 thin film grown by RF magnetron sputtering method

Er x Yb 2−x Si 2 O 7 thin films are synthesized on thermally oxidized n-Si substrates by RF-magnetron co-sputtering and subsequent annealing process. The photoluminescence properties of Er x Yb 2−x Si 2 O 7 thin films with 488 nm and 974 nm pumping lasers have been investigated.