Nanohandling automation within a scanning electron microscope

In this paper, current research regarding a semi-automated handling station for TEM-lamella is described. The development of this station started with automated handling of microparts as described in many previous publications. However, within this project, we were able to apply current research to an economically important task for the semiconductor industry - TEM-lamella handling. This task consists of automatic tracking of the lamella, picking it up from the silicon wafer and placing it on a TEM-grid.