Soft X-ray reflectometer with laser produced plasma source

A soft X-ray reflectometor with laser-produced plasma source developed in the authorial lab is presented for the measurements of efficiencies of gratings, transmission of filter and reflectance of multilayer coatings. The reflectometer is composed of a soft X-ray laser-produced plasma source, a grazing incidence monochromator with a constant deviation angle, a vacuum chamber, a sample table, a photo-electronic unit and a computer controlling unit. The working wavelength is from 8 to 30 nm and the maximum sample size is 130 mm long by 120 mm wide by 120 mm high. In order to test the performances of the reflectometer, the reflectivity of multilayer coatings was obtained by using this device. The measured results agree well with the theoretical calculation. The reproducibility of measured reflectance is ±0.6%.