Analysis of gyrocompassing through miniaturized MEMS based on piezoresistive sensing

This work demonstrates high-performance in a low-footprint MEMS gyroscopes based on piezoresistive nano-gauge readout. Significant noise reduction can be obtained by increasing the current dissipation in differential nano gauges, each having a (250 nm)2 cross-section. Though the device is fabricated in a low-cost process and operates at relatively large pressures (about 4 mbar), the achievable angle random walk (ARW) approaches the theoretical thermomechanical limit of 0.9 mdps/√Hz. Within 800 µm × 450 µm only, and at biasing voltages for the sense electronic chain of 1.5 V only, the measurement of Earth rotation rate through gyroscope carouseling is clearly demonstrated with stability up to more than 1000 s.