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Polycrystalline Silicon Oxidation Kinetics and Si / SiO2 Interface Width
Polycrystalline Silicon Oxidation Kinetics and Si / SiO2 Interface Width
1986
G. Queirolo
G. Ghidini
L. Meda
C Signorini
A. Armigliato
Keywords:
Polycrystalline silicon
Inorganic chemistry
Monocrystalline silicon
Kinetics
Nanocrystalline silicon
Chemistry
Chemical engineering
Analytical chemistry
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