An apparatus for plasma treatment of workpieces

The device is used for the plasma treatment of workpieces. The workpiece is inserted into an at least partially evacuable chamber a treatment station. The plasma chamber is delimited by a chamber base, a chamber lid, and a lateral chamber. The plasma chamber is coupled to a device for the controllable supply and / or discharge of process gases. The plasma chamber is also arranged on a rotatable plasma wheel, which is supported from a stationary base. In the region of the base, at least one process gas channel is arranged, which is partially delimited by a cover at least. The cover is formed as part of the plasma wheel and has at least one connecting opening to the process gas channel. The connection port is coupled via a connection channel and at least one control valve with an interior of the plasma chamber.