Coating of structured catalytic reactors by plasma assisted polymerization of tetramethyldisiloxane

An original process based on cold plasma assisted polymerization of tetramethyldisiloxane (TMDSO) in the presence of O 2 was developed to cover substrates showing various shapes (plate and foam). In the frame of catalytic application, this coating has to act as a bonding layer for the deposition of active phase such as VO x/TiO 2 well-known for its properties in NO x and volatile organic compounds abatement and in the production of chemical intermediates. Good results were obtained by the deposition of a 5- lm thick polysiloxane film followed by a thermal treatment under air at 650 8C and by a remote nitrogen plasma post treatment. This procedure led to a silica-like layer allowing its coating in an aqueous suspension of TiO 2. Such a multilayered material can be obtained homogeneously on the whole surface of a sample showing a 3D open geometry like metallic foam. Characterizations of the different steps of the elaborated multilayer material were performed by Fourier transformed infrared spectroscopy, Raman spectrometry, X-ray photoelectron spectroscopy, and electron probe micro-analyzer. POLYM. ENG. SCI., 51:940– 947, 2011. a2011 Society of Plastics Engineers