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Wafer defect analysis and monitoring method using process big data
Wafer defect analysis and monitoring method using process big data
2013
Younghoon Sohn
Mingoo Seo
Hyun Cheol Lee
Yu-Sin Yang
Chung Sam Jun
Sang-Kil Lee
K. Y. Lee
Insoo Cho
Keywords:
Big data
Wafer
Engineering
Manufacturing engineering
Computer science
monitoring methods
Correction
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