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Atomic layer deposition of Ruthenium: a theoretical insight
Atomic layer deposition of Ruthenium: a theoretical insight
2014
Quan Phung
Geoffrey Pourtois
Johan Swerts
Kristine Pierloot
Annelies Delabie
Keywords:
Atomic layer deposition
Ruthenium
Inorganic chemistry
Chemistry
Photochemistry
Correction
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