The thermoelectric conversion material and its manufacturing method, and a thermoelectric conversion module

The present invention is to provide a low thermal conductivity, and thermoelectric figure of merit of the thermoelectric conversion material obtained is further improved, a manufacturing method thereof, and a thermoelectric conversion module. The thermoelectric conversion material comprising a porous substrate having micropores, and a thermoelectric semiconductor thermoelectric semiconductor material layer formed on the porous substrate is formed, the porous substrate having a plastic film (A) formed on the plastic film (A) the polymer layer (B), the microporous layer is formed from the polymer (B) with plastic film (a) is a part. The method for producing the thermoelectric conversion material comprising a substrate made of the porous substrate forming step, the thermoelectric semiconductor material and a film on the porous substrate to form a semiconductor layer forming the thermoelectric project, wherein the substrate preparation step includes a step of , step 2 and step 3. The thermoelectric conversion module using the thermoelectric conversion material.